Blank Cover Image

Removal of Backside Particles by a Single Wafer Megasonic System

Author(s):
Publication title:
Cleaning and surface conditioning technology in semiconductor device manufacturing 10
Title of ser.:
ECS transactions
Ser. no.:
11(2)
Pub. date:
2007
Page(from):
95
Page(to):
100
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775687 [156677568X]
Language:
English
Call no.:
E23400/11-2
Type:
Conference Proceedings

Similar Items:

I. S. Park, S. J. Choi, C. K. Hong, H. K. Cho, Y. Q. Lu, E. Baiya, J. J. Rosato, M. R. Yalamanchili, E. Hansen

Electrochemical Society

Takeuchi, K., Tomozawa, A., Onishi, A., Tanzawa, A., Azuma, T., Umemura, S.-I., Wu, Y., Bran, M., Fraser, B.

Electrochemical Society

Kim,Y.H., Park,J.H., Lee,K.H., Choi,S.W., Yoon,H.S., Sohn,J.M.

SPIE-The International Society for Optical Engineering

Wu, Y., Franklin, C., Bran, M., Fraser, B.

Electrochemical Society

B. Xie, S. Park, J. Han, Z. Li, R. Gouk

Electrochemical Society

Hong, Y.K., Eom, D.H., Lee, S.H., Park, J.G., Busnaina, A.A.

Electrochemical Society

Lee, J.M., Cho, S.H., Kim, T.H., Park, J.-G., Busnaina, A.A.

SPIE - The International Society of Optical Engineering

Lin,H.-P., Chang,C.-H., Lee,C.-H., Pang,S.L., Lu,K.L.

SPIE - The International Society for Optical Engineering

Cohen, S. L., Rath, D., Lee, G., Furman, B., Pope, K. R., Tsai, R., Syverson, W., Gow, C., Liehr, M.

MRS - Materials Research Society

L. Y. Lee, T. Thanigaivelan, J. So, B. Frasier, I. Kashkoush

Electrochemical Society

Park, J.R., Kim, S.H., Yeo, G.-S., Choi, S.-W., Ki, W.-T., Yoon, H.-S., Sohn, J.-M.

SPIE-The International Society for Optical Engineering

Vereecke, G., Holsteyns, F., Veltens, J., Lux, M., Amauts, S., Kenis, K., Vos, R., Mertens, P., Heyns, M.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12