ARX Model of Elastic Nuclei for Rotors MEMS
- Author(s):
- Publication title:
- Microelectonics Technology and Devices - SBMicro 2008
- Title of ser.:
- ECS transactions
- Ser. no.:
- 14(1)
- Pub. Year:
- 2008
- Page(from):
- 83
- Page(to):
- 91
- Pages:
- 9
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566776462 [1566776465]
- Language:
- English
- Call no.:
- E23400/14-1
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
3
Conference Proceedings
Modeling of a Silane LPCVD Process Used for Microelectronics and MEMS Fabrication
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
10
Conference Proceedings
The Effect of Ge on the Structure & Morphology of SiC Films Grown on (111)Si Substrates
Trans Tech Publications |
5
Conference Proceedings
Elastic Waves in Nano-Columnar Porous 4H-SiC Measured by Brillouin Scattering
Trans Tech Publications | |
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Fluorescence evidence for cholesterol regular distribution in phosphatidylcholine and in sphingomyelin lipid bilayers
SPIE-The International Society for Optical Engineering |