Structural and Analytical Characterization by Scanning Transmission Electron Microscopy of Silicon-based Nanostructures

Structural and Analytical Characterization by Scanning Transmission Electron Microscopy of Silicon-based Nanostructures

Author(s):

Publication title:

Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes)

Title of ser.:

ECS transactions

Ser. no.:

10(1)

Pub. Year:

2007

Page(from):

57

Page(to):

64

Pages:

8

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781604238259 [1604238259]

Language:

English

Call no.:

E23400/10-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013288
Series ID:	PA00000034
Conf. info. (Name):	Analytical Techniques for Semiconductor Materials and Process Characterization - ALTECH
Conf. info. (Number):	2007
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2007.09.13-2007.09.14
Note for article:	Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007), September 13 - September 14, 2007, Munich, Germany

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