Blank Cover Image

Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials

Author(s):
Publication title:
Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes)
Title of ser.:
ECS transactions
Ser. no.:
10(1)
Pub. Year:
2007
Page(from):
21
Page(to):
31
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781604238259 [1604238259]
Language:
English
Call no.:
E23400/10-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Process-Induced Defects in Silicon: A Never Ending Story?

Kolbesen, B.O., Cerva, H.

Electrochemical Society
7 Conference Proceedings Aluminum Spiking Mechanism in Contact Holes Studied by High-Resolution Analytical TEM

Cerva, H., Kluppel, V., Barth, H. J., Helneder, H.

MRS - Materials Research Society
2 Conference Proceedings Delineation of Crystalline Defects in Semiconductor Substrates and Thin Films by Chemical Etching Techniques

B. Kolbesen, D. Possner, J. Maehliss

Electrochemical Society
8 Conference Proceedings Defect Aspects of Advanced Device Technologies

Kolbesen O. B.

Kluwer Academic Publishers
3 Conference Proceedings Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates

J. Maehliss, A. Abbadie, F. Brunier, B.O. Kolbesen

Electrochemical Society
9 Conference Proceedings New materials in future memories: high temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and elymat

Kilian, G., Kolbesen, B.O., Rommel, M., Pamler, W., Unger, E., Hoepfner, A.

Electrochemical Society
4 Conference Proceedings A Chromium-free Defect Etching Solution for Application on SOI

J. Maehliss, A. Abbadie, B. Kolbesen

Electrochemical Society
10 Conference Proceedings Influence of Silicon Defects on the Electrical Behavior of Semiconductor Power Devices

Schulze, H-J., Kolbesen, B. O.

MRS - Materials Research Society
5 Conference Proceedings Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science?

B. O. Kolbesen

Electrochemical Society
11 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy

Doll, O., Kolbesen, B.O.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Impact of Defects on the Technology of Highly Integrated Circuits

Kolbesen,B.O., Bergholz,W., Wendt,H.

Trans Tech Publications
12 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UVIVIS-Spectroscopy

Doll, O., Kolbesen, B.O.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12