Electrical Characterization of Advanced Gate Dielectrics for Scaled CMOS Technology
- Author(s):
- T. Ma
- Publication title:
- 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT)
- Title of ser.:
- ECS transactions
- Ser. no.:
- 8(1)
- Pub. Year:
- 2007
- Page(from):
- 93
- Page(to):
- 98
- Pages:
- 6
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781604238921 [1604238925]
- Language:
- English
- Call no.:
- E23400/8-1
- Type:
- Conference Proceedings
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