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Langmuir-probe Characterization of an Inductively-Coupled Remote Plasma System intended for CVD and ALD

Author(s):
Publication title:
Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Processing 3
Title of ser.:
ECS transactions
Ser. no.:
2(7)
Pub. Year:
2007
Page(from):
181
Page(to):
191
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775182 [1566775183]
Language:
English
Call no.:
E23400/2-7 [7]
Type:
Conference Proceedings

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