Blank Cover Image

The Formation Of Cu Nanofilm By Electrochemical ALD

Author(s):
Publication title:
Electrochemical Processing in ULSI and MEMS 2
Title of ser.:
ECS transactions
Ser. no.:
2(6)
Pub. Year:
2007
Page(from):
329
Page(to):
335
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775175 [1566775175]
Language:
English
Call no.:
E23400/2-6
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Studies of Cu Atomic Layer Replacement, Formed by Underpotential Deposits, to Form Pt Nanofilms Using Electrochemical Atomic Layer Epitaxy

J.L. Stickney, Y. Kim, J. Kim

Electrochemical Society
7 Conference Proceedings Thin Layer Electrochemical Studies in the Development of a Cycle of the Formation of CuInSe2 by Electrochemical ALE

Herrick, Robert D., II, Stickney, John L.

Electrochemical Society
2 Conference Proceedings Copper Nano Film Formation Using Electrochemical ALD

C. Thambidurai, N. Jayaraju, Y. Kim, J.L. Stickney

Electrochemical Society
8 Conference Proceedings Growth of Polycrystalline HgSe by Electrochemical Atomic-layer Epitaxy (EC-ALE)

Mathe, M., Cox, S., Happek, U., Stickney, J.

Electrochemical Society
3 Conference Proceedings Formation of Platinum films by Electrochemical Atomic Layer Deposition (ALD) via Redox Replacement of UPD: Studies of Pb UPD as a Sacrificial Metal

D. Vairavapandian, J.L. Stickney

Electrochemical Society
9 Conference Proceedings Electrodeposition of Tellurium Atomic Layer on n-GaAs(100) Substrate

J. Kim, J.L. Stickney

Electrochemical Society
4 Conference Proceedings PbTe - PbSe Superlattice Formation by Electrochemical Atomic Layer Deposition

J. Stickney, D. Banga

Electrochemical Society
10 Conference Proceedings Formation of Il-VI and Ill-V Compound Semiconductors by Electrochemical ALE

Wade, Travis L., Flowers, Billy H., Jr., Happek, Uwe, Stickney, John L.

Electrochemical Society
5 Conference Proceedings ZnS Thin Film Formation by Electrochemical ALE: Preliminary Doping Studies

Colletti, L.P., Slaughter, R., Stickney, J.L.

Electrochemical Society
11 Conference Proceedings FORMATION OF CdTe AND GaAs BY ELECTROCHEMICAL ATOMIC LAYER EPITAXY (ECALE)

Suggs, D. Wayne, Villegas, Ignacio, Gregory, Brian W., Stickney, John L.

Materials Research Society
6 Conference Proceedings Auger and LEED Studies of the Surface Chemistry of Inp(100) Wafers after Wet Etching, Ion Bombardment, and Electrochemical Etching

Muthuvel, M., Stickney, J.

Electrochemical Society
12 Conference Proceedings Thin-Layer Electrochemical Studies of ZnS, ZnSe, and ZnTe Formation by Electrochemical Atomic Layer Epitaxy (ECALE)

Colletti, Lisa P., Thomas, Sajan, Wilmer, Elvin M., Stickney, John L.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12