Blank Cover Image

Numerical and Experimental Investigation of Wet Chemical Etching of Silicon Wafers

Author(s):
Publication title:
Electrochemical Processing in ULSI and MEMS 2
Title of ser.:
ECS transactions
Ser. no.:
2(6)
Pub. Year:
2007
Page(from):
295
Page(to):
303
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775175 [1566775175]
Language:
English
Call no.:
E23400/2-6
Type:
Conference Proceedings

Similar Items:

DURST F., BORNER T.

Kluwer Academic Publishers

Leistner, T, Frey, L., Bauer, A., Schmidt, C., Lehmbacher, K., Haerler, P., Herrmann, W., Mesic, E., Kaufmann, P., …

Electrochemical Society

Kimihisa Kaneko, Tomoyoshi Noda, Masayoshi Sakata, Tomomi Uchiyama

American Society of Mechanical Engineers

Durst, Franz, Schaefer, Marcus, Wechsler, Klaus F.

American Institute of Chemical Engineers

Lee, J.W., Santana, C.J., Abernathy, C.R., Pearton, S.J., Ren, F., Hobson, W.S., Lothian, J.R., Wu, C.S.

Electrochemical Society

Stocker, D., Schubert, E. F., Grieshaber, W., Redwing, J. M., Boutros, K. S., Flynn, J. S., Vaudo, R. P.

MRS - Materials Research Society

Franz Durst

American Society of Mechanical Engineers

Schwesinger,N., Albrecht,A.

SPIE-The International Society for Optical Engineering

Durst, Franz, Wechsler, Klaus F., Schaefer, Marcus

American Institute of Chemical Engineers

Wunder, V.K., Popovska, N., Gerhard, H., Emig, G., Kadinski, L., Durst, F.

Electrochemical Society

Chen,P.-H., Hsieh,C.-M., Peng,H.-Y., Chyu,M.K.

SPIE-The International Society for Optical Engineering

Visconti, P., Reshchikov, M.A., Jones, K.M., Yun, F., Wang, D. F., Cingolani, R., Morkoc, H., Litton, C. W., Molnar, R. …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12