Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target

Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target

Author(s):

Publication title:

Innovation for applied science and technology : selected, peer reviewed papers from the Second International Conference on Engineering and Technology Innovation 2012, November 2-6, 2012, Kaohsiung, Taiwan, R. O. C.

Title of ser.:

Applied mechanics and materials

Ser. no.:

284-287

Pub. Year:

2013

Vol.:

1

Page(from):

108

Page(to):

112

Pages:

5

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

16609336

ISBN:

9781627480550 [1627480552]

Language:

English

Call no.:

A69500/284

Type:

Conference Proceedings

Details

TDL ID:	ZA00053055
Series ID:	PA00000242
Conf. info. (Name):	International Conference on Engineering and Technology Innovation
Conf. info. (Number):	2nd
Conf. info. (Venue):	Kaohsiung, Taiwan, R.O.C.
Conf. info. (Date):	2012.11.02-2012.11.06
Note for article:	2nd International Conference on Engineering and Technology Innovation, Kaohsiung, Taiwan, R.O.C., November 2-6, 2012

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