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Stripping Photo-Resist with RF Dielectric Barrier Atmospheric Pressure Plasma

Author(s):
Publication title:
Energy, environment and sustainable development : selected, peer reviewed papers from the 2012 Asian Pacific Conference on Energy, Environment and Sustainable Development (APEESD 2012), Kuala Lumpur, Malaysia, 12-13 November 2012
Title of ser.:
Applied mechanics and materials
Ser. no.:
260-261
Pub. Year:
2013
Vol.:
1
Page(from):
114
Page(to):
119
Pages:
6
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9781622769018 [1622769015]
Language:
English
Call no.:
A69500/260
Type:
Conference Proceedings

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