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Influence of Discharge Gas Pressure on Structural Properties of SnO2 Thin Films Deposited by Reactive Magnetron Sputtering

Author(s):
Publication title:
Advances on materials engineering : selected, peer reviewed papers from the 2013 International Conference on Materials Engineering (ICMEN 2013), May 17-19, 2013, Nanjing, China
Title of ser.:
Applied mechanics and materials
Ser. no.:
377
Pub. Year:
2013
Page(from):
217
Page(to):
221
Pages:
5
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9783037858011 [303785801X]
Language:
English
Call no.:
A69500/377
Type:
Conference Proceedings

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