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PZT Thin Films Deposited by RF Magnetron Sputtering

Author(s):
Publication title:
Advanced engineering and materials : selected, peer reviewed papers from the 2013 International Conference on Mechanical Engineering and Materials (ICMEM 2013), Sanya, China, 27-28 January 2013
Title of ser.:
Applied mechanics and materials
Ser. no.:
302
Pub. date:
2013
Page(from):
8
Page(to):
13
Pages:
6
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9781627480598 [1627480595]
Language:
English
Call no.:
A69500/302
Type:
Conference Proceedings

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