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An Improved Fault Transfer Table Based Fault Modeling Method in Etch Process of Semiconductor Wafer Manufacturing System

Author(s):
Publication title:
Advanced research on applied mechanics and manufacturing system : selected, peer reviewed papers from the 2012 International Conference on Applied Mechanics and Manufacturing System (AMMS2012), November 24-25, 2012, Guangzhou, China
Title of ser.:
Applied mechanics and materials
Ser. no.:
252
Pub. Year:
2013
Page(from):
422
Page(to):
425
Pages:
4
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9783037855621 [3037855622]
Language:
English
Call no.:
A69500/252
Type:
Conference Proceedings

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