Fixed-Oxide-Charge Characterization by Photoreflec-tance Spectroscopy in HfO2 on Ge treated by Fluorine

Fixed-Oxide-Charge Characterization by Photoreflec-tance Spectroscopy in HfO2 on Ge treated by Fluorine

Author(s):

Publication title:

SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices

Title of ser.:

ECS transactions

Ser. no.:

16(10)

Pub. Year:

2008

Page(from):

699

Page(to):

705

Pages:

7

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566776561 [1566776562]

Language:

English

Call no.:

E23400/16-10

Type:

Conference Proceedings

Details

TDL ID:	ZA00047173
Series ID:	PA00000034
Conf. info. (Name):	SiGe, Ge, and Related Compounds: Materials, Processing, and Devices Symposium ; PRiME Joint International Conference
Conf. info. (Number):	3rd ; 2008
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	2008.10.12-2008.10.17
Note for article:	3rd SiGe, Ge, and Related Compounds: Materials, Processing, and Devices Symposium which is part of the PRiME 2008 Joint International Conference held in Honolulu, Hawaii from October 12-17, 2008

Similar Items:

1 Conference Proceedings Surface treatment effects on Si(111) and (100) surface structures and Si/SiO2 interface state Yamamoto,H., Okumura,K., Kanashima,T., Okuyama,M. SPIE-The International Society for Optical Engineering	7 Conference Proceedings 20 Effect of Precursor Pulse Time on Charge Trapping and Mobility of ALD HfO2 Akbar, M., Moumen, N., Peterson, J., Bamett, J., Hussain, M., Lee, J.C. Electrochemical Society
2 Conference Proceedings SIMILARITY OF VACANCY CREATION MECHANISMS IN Si DOPED GaAs AND Ga DOPED ZnSe OBSERVED BY A MONOENERGETIC POSITRON BEAM Tanigawa, S., Lee, J. L., Kawabe, M., Miyajima, T., Okuyama, H., Akimoto, K., Mori, Y Materials Research Society	8 Conference Proceedings Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD Modreanu, M., Hurley, P.K., O'Sullivan, B.J., O'Looney, B., Senateur, J.-P., Rousell, H., Rousell, F., Audier, M., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Effect of Fixed Oxide Charges and Donor-Like Interface Traps on the Breakdown Voltage of SiC Devices with FGR and JTE Terminations C.T. Yen, H.T. Hung, C.C. Hung, C.Y. Lee, L.S. Lee Trans Tech Publications	9 Conference Proceedings Ionic conductivity of lithium in Li1.44Al0.33SiO3.2-LinMO4 (M = P, V, W) mixed anion glasses Uchida, T., Okuyama, H., Kawakami, Y., Ikuta, H., Wakihara, M. Electrochemical Society
4 Conference Proceedings Material and Electrical Characterization of HfO2 Films for MIM Capacitors Application Hu, Hang, Zhu, Chunxiang, Lu, Y. F., Wu, Y. H., Liew, T., Li, M. F., Cho, B. J., Choi, W. K., Yakovlev, N. Materials Research Society	10 Conference Proceedings Physical Characterization of HfO2 Deposited on Ge Substrates by MOCVD Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., … Materials Research Society
5 Conference Proceedings Optical Detection of Laser-Cooled Ions in a Penning Trap Imajo, H. &al ESA Publications Division	11 Conference Proceedings Physical Characterization of HfO2 Deposited on Ge Substrates by MOCVD Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., … Materials Research Society
6 Conference Proceedings A MEW INTRAMOLECULAR CHARGE TRANSFER MATERIAL FOR NONLINEAR OPTICS: PIPERONAL DERIVATIVES Mori, Y., Okamoto, M., Wada, T., Sasabe, H. Materials Research Society	12 Conference Proceedings Dominant Chemical Reaction and Species for Silicon Epitaxial Growth in SiHCI3-H2 System at Atmospheric Pressure in a Horizontal Cold-Wall Reactor Habuka, H., Akiyama, S., Otsuka, T., Shimada, M., Okuyama, K. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12