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Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensors

Author(s):
Publication title:
Porous semiconductors : a symposium held in memory of Vitali Parkhutik and Volker Lehmann
Title of ser.:
ECS transactions
Ser. no.:
16(3)
Pub. date:
2008
Page(from):
61
Page(to):
67
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776493 [156677649X]
Language:
English
Call no.:
E23400/16-3
Type:
Conference Proceedings

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