Blank Cover Image

Failure Mechanism by Organic Contaminants in Si Device Fabrication

Author(s):
Publication title:
High Purity Silicon 10
Title of ser.:
ECS transactions
Ser. no.:
16(6)
Pub. Year:
2008
Page(from):
227
Page(to):
236
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776523 [156677652X]
Language:
English
Call no.:
E23400/16-6
Type:
Conference Proceedings

Similar Items:

Lee, E. -H., Lee, S. G., Park, B. H. O. S. G., Kim, K. H., Kang, J. K., Choi, Y. W.

SPIE - The International Society of Optical Engineering

Min,Y.H., Yoon,C.S., Kang,S.-J., Kim,H.-K.

SPIE-The International Society for Optical Engineering

Lee, E., Lee, S. G., Park, B. H. O, S. G., Kim, K. H., Kang, J. K., Choi, Y. W., Song, S. H.

SPIE - The International Society of Optical Engineering

Kang, S. -W., Kim, J. Y., Kim, R. H., So, B. -K., Lee, K. -S., Hwang, I. -W., Kim, D., Fleitz, P. A., Sun, H. -B., …

SPIE - The International Society of Optical Engineering

Lee, E.-H., Lee, S.G., Park, B.H.O.S.G., Kim, K.H., Kang, J.K., Chin, I., Kwon, Y.K., Choi, Y.W.

SPIE - The International Society of Optical Engineering

Kang,E., Keum,J.H., Lee,J.-G., Kim,Y., Cho,W.-J., Ha,C.-S.

SPIE-The International Society for Optical Engineering

Lee, E.-H., Lee, S.G., Kim, B.H.O.K.H., Kang, J.K., Kwon, Y.K., Chin, I.-J., Cho, Y.W., Song, S.H.

SPIE - The International Society of Optical Engineering

Kang, J. H., Chol, J. Y., Yun, K.H., Do, M., Lee, Y.S., Kim, K.

SPIE - The International Society of Optical Engineering

K.H. Lee, S.J. Lee, S.H. Kim, J.S. Bae, B.C. Cho

Electrochemical Society

C. Oh, D. Uh, D. Kim, J. Lee, H. Yun, I. Nam, M. Kim, K. Yoon, K. Hyung, N. Tokareva, H. Cheon, J. Kim, T. Chang

SPIE - The International Society of Optical Engineering

Chin, B. D., Lee, S. -H., Kim, J. K., Lee, C. H.

SPIE - The International Society of Optical Engineering

S. Lee, D. Ryu, J. Park, D. Nam, H. Kim, B. Kim, S. Woo, H. Cho

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12