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Formation and Annihilation of Hydrogen Related Donor States in Proton Implanted and Subsequently Plasma Hydrogenated N-Type Float Zone Silicon

Author(s):
Publication title:
High Purity Silicon 10
Title of ser.:
ECS transactions
Ser. no.:
16(6)
Pub. date:
2008
Page(from):
151
Page(to):
161
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776523 [156677652X]
Language:
English
Call no.:
E23400/16-6
Type:
Conference Proceedings

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