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Fabrication of Nanoscale Tubular Structures and Capsules of Oxides by ALD

Author(s):
Publication title:
Atomic layer deposition applications 3
Title of ser.:
ECS transactions
Ser. no.:
11(7)
Pub. date:
2007
Page(from):
149
Page(to):
154
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775731 [1566775736]
Language:
English
Call no.:
E23400/11-7
Type:
Conference Proceedings

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