Blank Cover Image

Large Scaled ALD/PECVD Reactor for Flat Panel Display Application

Author(s):
Publication title:
Atomic layer deposition applications 3
Title of ser.:
ECS transactions
Ser. no.:
11(7)
Pub. date:
2007
Page(from):
31
Page(to):
38
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775731 [1566775736]
Language:
English
Call no.:
E23400/11-7
Type:
Conference Proceedings

Similar Items:

K. Murata, N. Miyatake, Y. Mori, H. Tachibana, Y. Uraoka

Electrochemical Society

Schaefer, L. H.

SPIE-The International Society for Optical Engineering

Cina,S., Baynes,N., Moons,E., Friend,R.H., Burroughes,J.H., Towns,C.R., Heeks,K., O'Dell,R., O'Conner,S., …

SPIE-The International Society for Optical Engineering

8 Conference Proceedings Large flat panel profiler

Freischlad,K.R.

SPIE-The International Society for Optical Engineering

3 Conference Proceedings Flat-panel autostereoscopic display

Tsai,C.-H., Lee,K., Hsueh,W.-J., Lee,C.K.

SPIE-The International Society for Optical Engineering

Nam, G -J, Seo, M -H, Ryu, K -H, Kwak, N -H

SPIE - The International Society of Optical Engineering

Lorenzo,A.De, Librandi,R., Rothman,N.

SPIE - The International Society for Optical Engineering

Quast,T., Marticello,D.N.

SPIE-The International Society for Optical Engineering

Van Atta, Richard H., Goodell, Larry, Cohen, Brian S., Loppitz, Michael J., Marks, Michael B., Bardsley, Norman, Kimzey, …

SPIE

Washio,K.

SPIE - The International Society for Optical Engineering

Jain,K., Dunn,T.J., Farmiga,N., Zemel,M., Weisbecker,C.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings *Laser-based flat panel displays

Bischel, W. K.

MRS-Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12