Blank Cover Image

Recent Trends on the ALD Technology for ULSI Device Fabrication

Author(s):
Publication title:
Atomic layer deposition applications 2
Title of ser.:
ECS transactions
Ser. no.:
3(15)
Pub. Year:
2007
Page(from):
3
Page(to):
13
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775427 [1566775426]
Language:
English
Call no.:
E23400/3-15
Type:
Conference Proceedings

Similar Items:

Lee, C.H., Choi, J.B., Yook, J.S., Lee, S.J., Park, K.W., Bae, S.H., Lee, H.C., Kim, C.K., Kang, T.W., Hong, J.K., Kim, …

SPIE

Yu, S.H., Jung, B.H., Lee, K.B., Kim, H.D., Paik, J.S., Ko, C.G., Cho, S.H.

Electrochemical Society

Cho, S.H., Sun, K.H., Lee, J.S., Kim, Y.Y.

SPIE - The International Society of Optical Engineering

Lee, W.-J., Cho, I.-K., Han, P., Kim, W.-S., Bae, B.-S., Ahn, S.-H.

SPIE - The International Society of Optical Engineering

C. Bae, S. Kim, H. Shin, J. Kim

Electrochemical Society

Jung, K.H., Cho, N.I., Lee, J.H., Yang, S.J., Kim, C.K., Lee, B.-T., Rim, K.H., Kim, N.-K., Kim, E.-D.

Trans Tech Publications

Cho, J.S., Baek, S.H., Nam, K.H., Cho, H.J., Courboin, D., Jeong, S.H., Lee, I.S., Shin, C., Kim, H.S.

SPIE-The International Society for Optical Engineering

Jung, K.H., Cho, N.I., Lee, J.H., Yang, S.J., Kim, C.K., Lee, B.-T., Rim, K.H., Kim, N.-K., Kim, E.-D.

Trans Tech Publications

Song, S.C., Lee, B.H., Zhang, Z., Choi, K., Bae, S.H., Alshareef, H., Majhi, P., Wen, H.C., Bennett, J., Sassman, B., …

Electrochemical Society

S.K. Kim, H.D. Lee, P.J. Kwak, S.J. Kim, S.H. Hong, J.S. Choi

Trans Tech Publications

Lee, E.-H., Lee, S.G., Kim, B.H.O.K.H., Kang, J.K., Kwon, Y.K., Chin, I.-J., Cho, Y.W., Song, S.H.

SPIE - The International Society of Optical Engineering

J. Kim, C. Lee, A. Kim, S. Kim

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12