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Nano-metrology of macro-systems

Author(s):
  • F. Garoi ( National Institute for Laser, Plasma and Radiation Physics, Romania )
  • D. Apostol ( National Institute for Laser, Plasma and Radiation Physics, Romania )
  • P. Schiopu ( Univ. Politehnica Bucuresti, Romania )
  • P. C. Logofatu ( National Institute for Laser, Plasma and Radiation Physics, Romania )
  • V. Damian ( National Institute for Laser, Plasma and Radiation Physics, Romania )
Publication title:
Advanced topics in optoelectronics, microelectronics, and nanotechnologies IV : 28-31 November 2008, Constanta, Romania
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7297
Pub. Year:
2009
Page(from):
72971G-1
Page(to):
72971G-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475596 [0819475599]
Language:
English
Call no.:
P63600/7297
Type:
Conference Proceedings

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