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Quantitative characterization of supersmooth surface with roughness in the sub-nanometer range

Author(s):
  • Z. Shen ( Tongji Univ., China )
  • Z. Wang ( Tongji Univ., China )
  • B. Ma ( Tongji Univ., China )
  • L. Wang ( Tongji Univ., China )
  • Y. Ji ( Tianjin Jinhang Institute of Technology Physics, China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7283
Pub. Year:
2009
Vol.:
1
Page(from):
72830B-1
Page(to):
72830B-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475435 [0819475432]
Language:
English
Call no.:
P63600/7283
Type:
Conference Proceedings

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