Three regions in the material removal rate with the increase of the concentration of abrasives slurry

Three regions in the material removal rate with the increase of the concentration of abrasives slurry

Author(s):

Y. Guo ( Xiamen Univ., China )
W. Yang ( Xiamen Univ., China )
Q. Xu ( Chengdu Fine Optical Engineering Research Ctr., China )
Y. Li ( Chengdu Fine Optical Engineering Research Ctr., China )

Publication title:

4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7282

Pub. Year:

2009

Vol.:

1

Page(from):

72820O-1

Page(to):

72820O-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819475428 [0819475424]

Language:

English

Call no.:

P63600/7282

Type:

Conference Proceedings

Details

TDL ID:	ZA00052803
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2008 : 4th
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2008.11.19-2008.11.21
Note for article:	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 19-21 November 2008, Chengdu, China - Poster Session, 72820O, 7282-23

Similar Items:

1 Conference Proceedings Effects of velocity and pressure distributions on material removal rate in polishing process Y. Li, J. Wang, Q. Xu, W. Yang, Y. Guo Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Photoluminescent (PL) investigation on mesoporous molecular sieve materials He, N-Y., Yang, C., Liao, L-S., Dai, Q., Li, P., Xu, C., Lu, Z-H., Yuan, C-W. Elsevier
2 Conference Proceedings Material removal rate based on edge effects in ultraprecision polishing process W. Yang, Y. Guo, Q. Xu Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings Research of optical flats in pad polishing J. Wang, Y. Guo, Y. Lee, Q. Xu, W. Yang Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings The Surface Topography in Machining of Medical Metallic Materials: A Review Y. Xu, Y. Qiao, P.Q. Guo, Y. Li Trans Tech Publications	9 Conference Proceedings Removal Mechanism in Wire-Sawing of Hard-Brittle Material Meng, J. F., Li, J. F., Ge, P. Q., Gao, W. Trans Tech Publications
4 Conference Proceedings Influence of slurry pH on material removal rate and surface roughness of super-precision polishing of LBO crystal J. Li, Y. Zhu, D. Zuo, C. Chen Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Determining the Effect of Slurry Flow Rate on the Tribological, Thermal and Removal Rate Attributes of Copper CMP Li, Z., Borucki, L., Philiopssian, A. Electrochemical Society
5 Conference Proceedings Three methods of formulation to increment of load bus voltage magnitude in power system Q. Liao, Z. Li, G. Xu, W. Wu Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Research on New Materials to Improve the Bonding Strength and Relieve Contamination of the Cement Slurry with Oil Based Muds Z.Y. Li, H.H. Liu, X.Y. Guo, X.W. Cheng, H.J. Ou Trans Tech Publications
6 Conference Proceedings A Novel Superfine Machining Technology Based on the Magnetorheological Effect of Abrasive Slurry J.B. Lu, J. Yu, Q.S. Yan, W.Q. Gao, L.C. Zhang Trans Tech Publications	12 Conference Proceedings Impact of Slurry Particle Aggregation upon Pad Surface Topography and Film Removal Rate in Chemical Mechanical Planarization Zhong, L., Yang, J. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12