Blank Cover Image

Effects of velocity and pressure distributions on material removal rate in polishing process

Author(s):
  • Y. Li ( Chengdu Fine Optical Engineering Research Ctr., China )
  • J. Wang ( Chengdu Fine Optical Engineering Research Ctr., China )
  • Q. Xu ( Chengdu Fine Optical Engineering Research Ctr., China )
  • W. Yang ( Xiamen Univ., China )
  • Y. Guo ( Xiamen Univ., China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7282
Pub. date:
2009
Vol.:
1
Page(from):
72820G-1
Page(to):
72820G-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
Language:
English
Call no.:
P63600/7282
Type:
Conference Proceedings

Similar Items:

W. Yang, Y. Guo, Q. Xu

Society of Photo-optical Instrumentation Engineers

Xu,Q., Wang,J., Yu,J., Yang,F.

SPIE-The International Society for Optical Engineering

Y. Guo, W. Yang, Q. Xu, Y. Li

Society of Photo-optical Instrumentation Engineers

Tseng, W.-T., Wang, Y.-S., Chin, J.-H., Pan, W.-C.

Electrochemical Society

J. Wang, Y. Guo, Y. Lee, Q. Xu, W. Yang

Society of Photo-optical Instrumentation Engineers

G.X. Wang, K.J. Xu, M.Q. Zhu, B. Tian

Trans Tech Publications

J.H. An, G.S. Lee, W.J. Lee, B.C. Shin, J.D. Seo

Trans Tech Publications

J. Li, Y. Zhu, D. Zuo, C. Chen

Society of Photo-optical Instrumentation Engineers

Su, J. X., Guo, D. M., Kang, R. K., Jin, Z. J., Li, X. J., Tian, Y. B.

Trans Tech Publications

J. Lu, G.Q. Hu, H. Guo, X.P. Xu

Trans Tech Publications

Yang, Y-L., Jin, Y., Yu, Z. Q., Wang, Z-W.

American Institute of Chemical Engineers

Guo, Q., Wang, J., Park, C., Oshima, M.

Society of Plastics Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12