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Effects of velocity and pressure distributions on material removal rate in polishing process

Author(s):
  • Y. Li ( Chengdu Fine Optical Engineering Research Ctr., China )
  • J. Wang ( Chengdu Fine Optical Engineering Research Ctr., China )
  • Q. Xu ( Chengdu Fine Optical Engineering Research Ctr., China )
  • W. Yang ( Xiamen Univ., China )
  • Y. Guo ( Xiamen Univ., China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7282
Pub. Year:
2009
Vol.:
1
Page(from):
72820G-1
Page(to):
72820G-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
Language:
English
Call no.:
P63600/7282
Type:
Conference Proceedings

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