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Influence of slurry pH on material removal rate and surface roughness of super-precision polishing of LBO crystal

Author(s):
  • J. Li ( Nanjing Univ. of Aeronautics and Astronautics, China )
  • Y. Zhu ( Nanjing Univ. of Aeronautics and Astronautics, China ) , ( Technical Institute of Physics and Chemistry, China )
  • D. Zuo ( Nanjing Univ. of Aeronautics and Astronautics, China )
  • C. Chen ( Technical Institute of Physics and Chemistry, China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7282
Pub. date:
2009
Vol.:
1
Page(from):
728209-1
Page(to):
728209-5
Pages:
5
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
Language:
English
Call no.:
P63600/7282
Type:
Conference Proceedings

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