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Optical properties of amorphous silicon thin films fabricated by RF magnetron sputtering

Author(s):
  • B. Liu ( Wuhan Univ. of Technology, China )
  • Q. Zhao ( Wuhan Univ. of Technology, China )
  • P. Zhena ( Wuhan Univ. of Technology, China )
Publication title:
Photonics and Optoelectronics Meetings (POEM) 2008 : optoelectronic devices and integration : 24-27 November 2008, Wuhan, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7279
Pub. Year:
2009
Page(from):
72791W-1
Page(to):
72791W-11
Pages:
11
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475381 [0819475386]
Language:
English
Call no.:
P63600/7279
Type:
Conference Proceedings

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