MEMS product engineering using fabrication process development tools
- Author(s):
- K. Hahn ( Univ. of Siegen, Germany )
- T. Schmidt ( Univ. of Siegen, Germany )
- D. Ortloff ( Process Relations GmbH, Germany )
- J. Popp ( Process Relations GmbH, Germany )
- A. Wagener ( Process Relations GmbH, Germany )
- Publication title:
- Micro- and nanotechnology : materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7269
- Pub. Year:
- 2008
- Page(from):
- 72690W-1
- Page(to):
- 72690W-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819475213 [0819475211]
- Language:
- English
- Call no.:
- P63600/7269
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |