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A novel multi-actuation CMOS RF MEMS switch

Author(s):
  • C.-I. Lee ( Industrial Technology Research Institute, Taiwan )
  • C.-H. Ko ( Industrial Technology Research Institute, Taiwan )
  • T.-C. Huang ( Industrial Technology Research Institute, Taiwan )
Publication title:
Smart structures, devices, and systems IV : 10-12 December 2008, Melbourne, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7268
Pub. Year:
2008
Page(from):
726804-1
Page(to):
726804-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475206 [0819475203]
Language:
English
Call no.:
P63600/7268
Type:
Conference Proceedings

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