A novel multi-actuation CMOS RF MEMS switch
- Author(s):
- C.-I. Lee ( Industrial Technology Research Institute, Taiwan )
- C.-H. Ko ( Industrial Technology Research Institute, Taiwan )
- T.-C. Huang ( Industrial Technology Research Institute, Taiwan )
- Publication title:
- Smart structures, devices, and systems IV : 10-12 December 2008, Melbourne, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7268
- Pub. Year:
- 2008
- Page(from):
- 726804-1
- Page(to):
- 726804-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819475206 [0819475203]
- Language:
- English
- Call no.:
- P63600/7268
- Type:
- Conference Proceedings
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