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Coupled analysis on the micro-airflow and its actuator for MEMS fluidic devices

Author(s):
  • L. Li ( Shanghai Univ. of Electric Power, China )
  • R. Zhu ( Tsinghua Univ., China )
  • Z. Zhou ( Tsinghua Univ., China )
  • J. Ren ( Shanghai Univ. of Electric Power, China )
Publication title:
MEMS/NEMS technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7159
Pub. Year:
2009
Page(from):
71590S-1
Page(to):
71590S-5
Pages:
5
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819474032 [0819474037]
Language:
English
Call no.:
P63600/7159
Type:
Conference Proceedings

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