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Design optimization of phase-shifting point diffraction interferometer

Author(s):
  • K. Liu ( Institute of Electrical Engineering, China )
  • Y. Li ( Institute of Electrical Engineering, China )
Publication title:
2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7156
Pub. Year:
2008
Vol.:
2
Page(from):
71561W-1
Page(to):
71561W-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819474001 [0819474002]
Language:
English
Call no.:
P63600/7156
Type:
Conference Proceedings

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