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Application research of spectrum measurement technology in thin-film thickness wideband monitoring system

Author(s):
  • J. Han ( Xidian Univ., China )
  • X. Shang ( Xi'an Technological Univ., China )
  • Y. An ( Xidian Univ., China )
  • X. Jiang ( Xi'an Institute of Applied Optics, China )
  • F. Wang ( Xi'an Institute of Applied Optics, China )
Publication title:
Ninth International Symposium on Laser Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7155
Pub. Year:
2008
Vol.:
2
Page(from):
71553A-1
Page(to):
71553A-10
Pages:
10
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473981 [0819473987]
Language:
English
Call no.:
P63600/7155
Type:
Conference Proceedings

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