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Analysis of the effect of laser bandwidth on imaging of memory patterns

Author(s):
  • N. Seong ( Cymer, Inc., United States )
  • I. Kim ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
  • D. Kang ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
  • S.-H. Lee ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
  • J. Choi ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
Publication title:
Lithography Asia 2008
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
Pub. Year:
2008
Vol.:
2
Page(from):
714042-1
Page(to):
714042-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473813 [0819473812]
Language:
English
Call no.:
P63600/7140
Type:
Conference Proceedings

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