Blank Cover Image

A methodology for double patterning compliant split and design

Author(s):
Publication title:
Lithography Asia 2008
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
Pub. Year:
2008
Vol.:
1
Page(from):
71401X-1
Page(to):
71401X-14
Pages:
14
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473813 [0819473812]
Language:
English
Call no.:
P63600/7140
Type:
Conference Proceedings

Similar Items:

V. Wiaux, S. Verhaegen, S. Cheng, F. Iwamoto, P. Jaenen

Society of Photo-optical Instrumentation Engineers

Verhaegen, S., Nackaerts, A., Wiaux, V., Hendrickx, E., Vandenberghe, G.

SPIE - The International Society of Optical Engineering

M. Drapeau, V. Wiaux, E. Hendrickx, S. Verhaegen, T. Machida

SPIE - The International Society of Optical Engineering

M. O. de Beeck, J. Versluijs, V. Wiaux, T. Vandeweyer, I. Ciofi, H. Struyf, D. Hendrickx, J. V. Olmen

SPIE - The International Society of Optical Engineering

M. Maenhoudt, R. Gronheid, N. Stepanenko, T. Matsuda, D. Vangoidsenhoven

Society of Photo-optical Instrumentation Engineers

Maenhoudt,M., Verhaegen,S., Ronse,K., Flagello,D.G., Geh,B., Kaiser,W.M.

SPIE - The International Society for Optical Engineering

G. E. Bailey, A. Tritchkov, J. Park, L. Hong, V. Wiaux, E. Hendrickx, S. Verhaegen, P. Xie, J. Versluijs

SPIE - The International Society of Optical Engineering

10 Conference Proceedings Limits of optical lithography

Maenhoudt,M., Verhaegen,S., Ronse,K., Zandbergen,P., Muzio,E.G.

SPIE - The International Society for Optical Engineering

M. Dusa, J. Quaedackers, O. F. A. Larsen, J. Meessen, E. van der Heijden, G. Dicker, O. Wismans, P. de Haas, K. van I. …

SPIE - The International Society of Optical Engineering

Jonckheere,R.M., Vandenberghe,G.N., Wiaux,V., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

Park, J., Hsu, S., Van Den Broeke, D., Chen, J. F., Dusa, M., Socha, R., Finders, J., Vleeming, B., van Oosten, A., …

SPIE - The International Society of Optical Engineering

Q. Gronheid, E. Hendrickx, V. Wiaux, M. Maenhoudt, M. Goethals

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12