Optimizing integrated optical CD monitoring by floating pre-process variations in a complex multi-layer structure
- Author(s):
- Publication title:
- Lithography Asia 2008
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7140
- Pub. Year:
- 2008
- Vol.:
- 1
- Page(from):
- 71400G-1
- Page(to):
- 71400G-12
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819473813 [0819473812]
- Language:
- English
- Call no.:
- P63600/7140
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Optical characterization of the Ge/Si (001) islands in multilayer structure
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
Vacuum Arc Remelting Process of High-Alloy Bearing Steel and Multi-Scale Control of Solidification Structure
Trans Tech Publications |
8
Conference Proceedings
Bandwidth guaranteed, delay, and delay variation-bounded integrated routing and wavelength assignment algorithm for multicast in IP/DWDM optical Internet
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
New Nanocrystalline Si Floating Gate Structure for Nonvolatile Memory Application
Materials Research Society |
9
Conference Proceedings
Process Optimization by Means of Integrated Monitoring Tools in the Semiconductor Industry
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Development of bock-end-of-the-line applications using optical digital profilometry (ODP)
Society of Photo-optical Instrumentation Engineers |
5
Conference Proceedings
ArF scanner performance improvement by using track integrated CD optimization [6152-80]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |