Blank Cover Image

Deposition of nanocrystalline SiC films using helicon wave plasma enhanced chemical vapor deposition

Author(s):
  • W. Lu ( Hebei Univ., China )
  • W. Yu ( Hebei Univ., China )
  • L. Ma ( Hebei Univ., China )
  • L. Wu ( Hebei Univ., China )
  • G. Fu ( Hebei Univ., China )
Publication title:
Optoelectronic Materials and Devices III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7135
Pub. date:
2008
Vol.:
2
Page(from):
71353F-1
Page(to):
71353F-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473752 [0819473758]
Language:
English
Call no.:
P63600/7135
Type:
Conference Proceedings

Similar Items:

Yu W., Wang C., Lu W., Cui S., Fu G.

SPIE - The International Society of Optical Engineering

W. Yu, J. Du, L. Zhang, S. Cui, L. Han

Society of Photo-optical Instrumentation Engineers

Yu, W., Lu, W., Wang, B., Han, L., Fu, G.

SPIE - The International Society of Optical Engineering

G. Fu, L. Ma, W. Lu, Z. Zhang, W. Yu

Society of Photo-optical Instrumentation Engineers

Yu W., Lu W., Wang C., Ding W., Fu G.

SPIE - The International Society of Optical Engineering

W.-J. Qi, W.-F. Yu, B.-Z. Li, J. Liu, F. Lu

Society of Photo-optical Instrumentation Engineers

Fu G., Yu W., Lu W., Zhu H., Zhang L., Ding W.

SPIE - The International Society of Optical Engineering

Chen, L., Levy, R.A., Grow, J.M., Yu, Y.

Electrochemical Society

Yu W., Zhang L., Wang B., Han X., Sun W., Fu G.

SPIE - The International Society of Optical Engineering

Li,W., Zhao,J., Zhao,X.-L., Cai,B.

SPIE-The International Society for Optical Engineering

Yu, W., Zheng, Z.Y., Han, L., Fu, G.S.

SPIE-The International Society for Optical Engineering

Lu, Zhong, Ma, Yi, Habermehl, Scott, Lucovsky, Gerry

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12