A robust control scheme of nanopositioning driven by ultrasonic motor

Author(s):

• F. Cheng ( Hefei Univ. of Technology, China )
• K.-C. Fan ( National Taiwan Univ., Taiwan, China )
• Y. Fei ( Hefei Univ. of Technology, China )

Publication title:

Fourth International Symposium on Precision Mechanical Measurements

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7130

Pub. Year:

2008

Vol.:

1

Page(from):

71301O-1

Page(to):

71301O-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473646 [0819473642]

Language:

English

Call no.:

P63600/7130

Type:

Conference Proceedings