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New method of thin-film thickness measurement in wavelength scanning interferometry

Author(s):
  • Y. M. Hwang ( SNU Precision Co., Ltd., Korea, Republic of )
  • J. S. Lee ( Seoul National Univ., Korea, Republic of )
  • H. J. Pahk ( Seoul National Univ., Korea, Republic of )
Publication title:
Fourth International Symposium on Precision Mechanical Measurements
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7130
Pub. Year:
2008
Vol.:
1
Page(from):
71300Z-1
Page(to):
71300Z-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473646 [0819473642]
Language:
English
Call no.:
P63600/7130
Type:
Conference Proceedings

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