High-speed AFM probe with micromachined membrane tip

High-speed AFM probe with micromachined membrane tip

Author(s):

B. Kim ( Univ. of Massachusetts, Lowell, United States )
B. H. Kwak ( Univ. of Massachusetts, Lowell, United States )
F. Jamil ( Univ. of Massachusetts, Lowell, United States )

Publication title:

Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7042

Pub. Year:

2008

Page(from):

704204-1

Page(to):

704204-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819472625 [081947262X]

Language:

English

Call no.:

P63600/7042

Type:

Conference Proceedings

Details

TDL ID:	ZA00052673
Series ID:	PA00000029
Conf. info. (Name):	SPIE NanoScience and Engineering : Instrumentation, Metrology, and Standards for Nanomanufacturing
Conf. info. (Number):	2008 : 2nd
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2008.08.10
Note for article:	Instrumentation, metrology, and standards for nanomanufacturing II, 10 August 2008, San Diego, California, USA - Session 1. Instrumentation and Metrology I, 704204, 7042-03

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