Metrology at the nanoscale: what are the grand challenges?

Author(s):

• K. W. Lyons ( National Institute of Standards and Technology, United States )
• M. T. Postek ( National Institute of Standards and Technology, United States )

Publication title:

Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7042

Pub. Year:

2008

Page(from):

704202-1

Page(to):

704202-13

Pages:

13

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819472625 [081947262X]

Language:

English

Call no.:

P63600/7042

Type:

Conference Proceedings