Blank Cover Image

Improvement of position accuracy in mask-writing electron beam lithography with a multi-pass writing strategy for reducing position errors due to resist charging

Author(s):
Publication title:
Photomask and next-generation lithography mask technology XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7028
Pub. Year:
2008
Vol.:
2
Page(from):
70281Y-1
Page(to):
70281Y-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472434 [0819472433]
Language:
English
Call no.:
P63600/7028
Type:
Conference Proceedings

Similar Items:

Komagata,T., Nakagawa,Y., Takemura,H., Gotoh,N.

SPIE-The International Society for Optical Engineering

Takemura,H., Komagata,T., Nakagawa,Y., Tananka,K.

SPIE - The International Society for Optical Engineering

K. Goto, K. Watakabe, T. Komagata, Y. Nakagawa

SPIE - The International Society of Optical Engineering

Komagata,T., Nakagawa,Y., Gotoh,N., Tanaka,K.

SPIE-The International Society for Optical Engineering

Kimura, N., Komagata, T., Nakagawa, Y., Gotoh, N., Tanaka, K.

SPIE - The International Society of Optical Engineering

Komagata,T., Nakagawa,Y., Gotoh,N., Tanaka,K.

SPIE-The International Society for Optical Engineering

Cinque, R., Buck, P., Yei, S. K., Komagata, T., Nakagawa, Y.

SPIE - The International Society of Optical Engineering

Komagata, T., Kimura, N., Funaki, K., Nakagawa, Y., Gotoh, N.

SPIE - The International Society of Optical Engineering

Komagata,T., Nakagawa,Y., Takemura,H., Gotoh,N., Tanaka,K.

SPIE-The International Society for Optical Engineering

Nakagawa,Y., Komagata,T., Takemura,H., Gotoh,N., Tanaka,K.

SPIE - The International Society for Optical Engineering

Nakagawa,Y., Komagata,T, Takemura,H., Gotoh,N., Tanaka,K.

SPIE-The International Society for Optical Engineering

Komagata, T., Kawase, Y., Nakagawa, Y., Gotoh, N., Tanaka, K.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12