Blank Cover Image

High-efficiency silicon immersion grating by electron-beam lithography

Author(s):
  • Y. Ikeda ( Photocoding, Japan )
  • N. Kobayashi ( Institute of Astronomy, Univ. of Tokyo, Japan )
  • H. Terada ( Subaru Telescope, National Astronomical Observatory of Japan, United States )
  • A. Shibayama ( NTT-AT Nanofabrication Corp., Japan )
  • A. Ozawa ( NTT-AT Nanofabrication Corp., Japan )
Publication title:
Ground-based and airborne instrumentation for astronomy II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7014
Pub. Year:
2008
Vol.:
4
Page(from):
701469-1
Page(to):
701469-12
Pages:
12
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472243 [0819472247]
Language:
English
Call no.:
P63600/7014
Type:
Conference Proceedings

Similar Items:

Y. Ikeda, N. Kobayashi, P. J. Kuzmenko, S. L. Little, C. Yasui

Society of Photo-optical Instrumentation Engineers

Parker,N.W., Brodie,A.D., McCoy,J.H.

SPIE - The International Society for Optical Engineering

Y. Ohmura, H. Nagasaka, T. Matsuyama, T. Nakashima, T. Kobayashi

Society of Photo-optical Instrumentation Engineers

8 Conference Proceedings High-n immersion lithography

H. Sewell, J. Mulkens, P. Graeupner, D. McCafferty, L. Markoya

Society of Photo-optical Instrumentation Engineers

Matsuzawa, N. N., Thunnakart, B., Ozawa, K., Yamaguchi, Y., Nakano, H., Kawahira, H.

SPIE - The International Society of Optical Engineering

N. Kobayashi, Y. Ikeda, H. Kawakita, K. Enya, T. Nakagawa

Society of Photo-optical Instrumentation Engineers

Ebizuka, N., Morita, S., Shimizu, T., Yamagata, Y., Omori, H., Wakaki, M., Kobayashi, H., Tokoro, H., Hirahara, Y.

SPIE-The International Society for Optical Engineering

Takei, K., Kobayashi, Y., Miyashiro, H., Terada, N.

Electrochemical Society

H. Terada, I. Yuji, N. Kobayashi, C. Yasui, T. -S. Pyo

Society of Photo-optical Instrumentation Engineers

Kuzmenko P. J

SPIE - The International Society of Optical Engineering

Yahiro,T., Hirayanagi,N., Morita,K., Irita,T., Yamamoto,H., Suzuki,S., Shimizu,H., Kawata,S., Okino,T., Suzuki,K.

SPIE-The International Society for Optical Engineering

T. Nawata, Y. Inui, I. Masada, E. Nishijima, T. Mabuchi, N. Mochizuki, H. Satoh, T. Fukuda

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12