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Adaptive measurement of deformation and shape by compensation using TV holography and digital holography

Author(s):
  • J. Kornis ( Budapest Univ. of Technology and Economics, Hungary )
  • B. Béki ( Budapest Univ. of Technology and Economics, Hungary )
  • R. Séfel ( Budapest Univ. of Technology and Economics, Hungary )
Publication title:
Optical micro- and nanometrology in microsystems technology II : 8-10 April 2008, Strasbourg, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6995
Pub. Year:
2008
Page(from):
699508-1
Page(to):
699508-10
Pages:
10
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471932 [0819471933]
Language:
English
Call no.:
P63600/6995
Type:
Conference Proceedings

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