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A novel method for fabricating an optical grating element with a fine grating pitch

Author(s):
  • K. -C. Chiu ( Industrial Technology Research Institute, Taiwan )
  • S. -L. Chang ( Industrial Technology Research Institute, Taiwan )
  • M. Hsu ( Industrial Technology Research Institute, Taiwan )
Publication title:
Micro-optics 2008 : 7-9 April 2008, Strasbourg, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6992
Pub. Year:
2008
Page(from):
699212-1
Page(to):
699212-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
16057422
ISBN:
9780819471901 [0819471909]
Language:
English
Call no.:
P63600/6992
Type:
Conference Proceedings

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