A beam operated MEMS variable optical attenuator
- Author(s):
- Publication title:
- Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6984
- Pub. Year:
- 2008
- Page(from):
- 69843N-1
- Page(to):
- 69843N-4
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471826 [0819471828]
- Language:
- English
- Call no.:
- P63600/6984
- Type:
- Conference Proceedings
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