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Research on the realization of high precision RC array through IC thin film technology

Author(s):
  • F. Sun ( Harbin Institute of Technology, China )
  • W. Jiang ( Heilongjiang Bada Universal Semiconductor Inc., China )
  • D. Wu ( Heilongjiang Bada Universal Semiconductor Inc., China )
  • S. Zhang ( Heilongjiang Bada Universal Semiconductor Inc., China )
Publication title:
Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6984
Pub. Year:
2008
Page(from):
69843I-1
Page(to):
69843I-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471826 [0819471828]
Language:
English
Call no.:
P63600/6984
Type:
Conference Proceedings

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