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Highly (h00) oriented growth of SrTiO3 thin films on Si(100) substrates by RF magnetron sputtering and their optical properties

Author(s):
  • J. H. Ma ( Shanghai Institute of Technical Physics, China )
  • J. H. Pin ( Shanghai Institute of Technical Physics, China )
  • Z. M. Huang ( Shanghai Institute of Technical Physics, China )
  • Y. H. Gao ( Shanghai Institute of Technical Physics, China )
  • T. Lin ( Shanghai Institute of Technical Physics, China )
Publication title:
Sixth International Conference on Thin Film Physics and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6984
Pub. date:
2008
Page(from):
69841Z-1
Page(to):
69841Z-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471826 [0819471828]
Language:
English
Call no.:
P63600/6984
Type:
Conference Proceedings

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