Blank Cover Image

A methyl BN film by using tris-di-methyl-amino-boron (TMAB) for future low-K interlayer

Author(s):
Publication title:
Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6984
Pub. Year:
2008
Page(from):
69841W-1
Page(to):
69841W-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471826 [0819471828]
Language:
English
Call no.:
P63600/6984
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Rate Etching of Ru and TaN using Electrochemical Reaction for Bevel Cleaning

H. Aoki, D. Watanabe, N. Ooi, J. Jeong, C. Kimura

Electrochemical Society
7 Conference Proceedings 4-μm pixel CMOS image sensor with low-image lag and high-temperature operability

Endo, Y., Nitta, Y., Kubo, H., Murao, T., Shimomura, K., Kimura, M., Watanabe, K., Yamamoto, S., Komori, S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Corrosion Suppression During Wet Processes in FEOL and BEOL for 45nm Node and Beyond

H. Aoki, D. Watanabe, S. Hotta, C. Kimura, T. Sugino

Electrochemical Society
8 Conference Proceedings Improvement of Anode Oxidation Reaction of a Fuel Cell using Ammonium Formate with Pt-Pd Catalysts

H. Aoki, T. Nitta, S. Kuwabata, C. Kimura, T. Sugino

Electrochemical Society
3 Conference Proceedings Characterization of Lanthanoid and Aluminum Based Oxide Film for Wide Bandgap Semiconductors

H. Aoki, N. Komatsu, M. Honjo, K. Masumoto, C. Kimura

Trans Tech Publications
9 Conference Proceedings Evaluation of Solid Ammonium Formate Oxidation for PEM Fuel Cells

K. Ohyama, C. Kimura, H. Aoki, S. Kuwabata, T. Sugino

Electrochemical Society
4 Conference Proceedings Ultrathin Oxide Film Formation Using Radical Oxygen in a UHV System

Watanabe, K., Kimura, S., Tatsumi, T.

MRS - Materials Research Society
10 Conference Proceedings Compositionally Asymmetric Tri-Color Superlattices Grown by Pulsed Laser Deposition

Lee, H. N., Christen, H. M., Rouleau, C. M., Senz, S., Lee, S. K., Hesse, D., Lowndes, D. H.

Materials Research Society
5 Conference Proceedings Investigations of the Redox Mechanism of Poly(5-Amino-2-Methyl-1 ,4- Naphthoquinone) (PAMNQ) Film

Hubert, S., Piro, B., Pham, M.C., Dao, L.H.

Electrochemical Society
11 Conference Proceedings Evaluation of a Novel Polyimide for Use as a Low-Loss, Low Dielectric Constant Interlayer in Electronic Packaging Applications

Dunson,Debra, Sankarapandian,M.S., Oyama,H., Webster,J., III,F.D.Barlow, Elshabini,A., McGrath,J.E.

SPIE - The International Society for Optical Engineering, IMAPS
6 Conference Proceedings Surface properties and field emission of BN and BCN films

T. Sugino, C. Kimura, H. Aoki

Society of Photo-optical Instrumentation Engineers
12 Conference Proceedings A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer

Park, H. W., Ju, B. K., Lee, Y. H., Park, J. H., Lee, N. Y., Koh, K. H., Shin, D. K., Kang, I. B., Samaan, N., Haskard, …

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12