
MEMS deformable mirrors for space and defense applications
- Author(s):
- T. G. Bifano ( Boston Univ., USA )
- P. Bierden ( Boston Micromachines Corp., USA )
- A. Cornelissen ( Boston Micromachines Corp., USA )
- Publication title:
- Micro (MEMS) and nanotechnologies for space, defense and security II : 18-20 April, 2008, Orlando, Florida, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6959
- Pub. Year:
- 2008
- Page(from):
- 695914-1
- Page(to):
- 695914-7
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471505 [081947150X]
- Language:
- English
- Call no.:
- P63600/6959
- Type:
- Conference Proceedings
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