A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science

A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science

Author(s):

P. A. Roman ( NASA Goddard Space Flight Ctr., USA )
W. B. Brinckerhoff ( NASA Goddard Space Flight Ctr., USA )
S. A. Getty ( NASA Goddard Space Flight Ctr., USA )
F. A. Herrero ( NASA Goddard Space Flight Ctr., USA )
R. Hu ( NASA Goddard Space Flight Ctr., USA )

Publication title:

Micro (MEMS) and nanotechnologies for space, defense and security II : 18-20 April, 2008, Orlando, Florida, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6959

Pub. Year:

2008

Page(from):

69590G-1

Page(to):

69590G-13

Pages:

13

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471505 [081947150X]

Language:

English

Call no.:

P63600/6959

Type:

Conference Proceedings

Details

TDL ID:	ZA00052590
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Micro (MEMS) and Nanotechnologies for Space, Defense, and Security
Conf. info. (Number):	2008 : 2nd
Conf. info. (Venue):	Orlando, Florida, USA
Conf. info. (Date):	2008.03.18-2008.03.20
Note for article:	Micro (MEMS) and nanotechnologies for space, defense and security II, Orlando, Florida, USA, 18-20 March 2008. Complex MEMS, 69590G, 6959-15

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