Active damping control of micromachined devices in a low atmospheric pressure environment
- Author(s):
- S. J. Kim ( Auburn Univ., USA )
- C. Chen ( Auburn Univ., USA )
- G. Flowers ( Auburn Univ., USA )
- R. Dean ( Auburn Univ., USA )
- Publication title:
- Active and passive smart structures and integrated systems 2008
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6928
- Pub. Year:
- 2008
- Page(from):
- 692820-1
- Page(to):
- 692820-11
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471147 [0819471143]
- Language:
- English
- Call no.:
- P63600/6928
- Type:
- Conference Proceedings
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